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Vacuum compatible feedback stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

Vacuum compatible feedback stage Product List

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Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

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Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

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Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

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Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.

This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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Vacuum-compatible 10nm feedback stage, micro-rotation type

Vacuum-compatible 10nm feedback stage, micro-rotation type

Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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